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Sulfur Hexafluoride use in Research Laboratories

The following UCLA processes are statutorily exempt:

  • Etching applications (17 CCR 95341(a)(2))
  • Use as a dielectric medium (17 CCR 95341(a)(3))
  • Use as an arc-quenching medium (17 CCR 95341(a)(4))

While the exemptions above do not require additional reporting, other exempt uses of SF₆ may require:

  • Tracking annual quantities of SF₆ purchased and used
  • Maintaining supporting records
  • Submitting annual reports to CARB
UCLA is committed to minimizing SF₆ use whenever feasible. Environmental Compliance conducts annual reviews of exempt SF₆ inventories to support ongoing regulatory compliance and identify opportunities for reduction.

If your research or operations require SF₆:

  1. Notify EH&S Environmental Compliance.
  2. EH&S will determine whether the intended use qualifies for a regulatory exemption.
  3. EH&S will advise whether recordkeeping and annual reporting requirements apply.