Because of its high global warming potential, the California Air Resources Board (CARB) passed a regulation to reduce sulfur hexafluoride (SF6) gas emissions by placing a ban on the sale, use, and release of SF6. Title 17, section 95341 of the California Code of Regulations (17 CCR 95341) lists exemptions to the regulation. Current processes at UCLA that are statutorily exempt from the SF6 regulation include:
- Use in etching (section 95341(a)(2))
- Use as a dielectric medium ((a)(3))
- Use as an arc quenching medium ((a)(4))
While not applicable for the above processes, several other exemptions exist that require users to keep records showing the annual quantity of SF6 purchased and used, and require an annual report to CARB.
Despite exemptions, UCLA is committed to optimizing and reducing SF6 use where feasible. Environmental Compliance annually assesses exempted inventory to ensure UCLA’s continued compliance.
If your research requires SF6, EH&S must be notified to determine if your use qualifies for an exemption, and whether record keeping and annual reporting is required. Please contact Environmental Compliance at (310) 825-5689 for more information or for assistance.
